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Finnish ALD equipment manufacturer Beneq has entered a partnership with Lung Pien Vacuum Industry Co., Ltd., a leading vacuum coating equipment manufacturer headquartered in Taiwan.

Beneq P400A, a thermal batch ALD production tool commonly used for optical coating applications.

ALD is a process of depositing single or multiple layers of atomic thin films, by forming self-limited reactions between precursor gases and the substrate surface. Key advantages include the ability to cover large areas, high step coverage, high thickness uniformity, low-temperature processing, and atomic-level film thickness control.

Beneq was the first in the world to begin using atomic layer deposition (ALD) for industrial production back in 1984. Today, it is a global leading manufacturer of ALD equipment, offering a wide range of technical products and R&D services, and is committed to finding industrial ALD solutions through co-development and collaboration. More recently, Beneq introduced AtomGrassTM ALD, a wide-angle, broadband anti-reflective (AR) coating that offers less than 0.07% average reflectance between 400 nm and 1000 nm in wavelength, as well as a drastic increase in performance at high angles of incidence.

“There is a clear, growing demand for ALD in the development of nano-processes in the integrated circuit industry. Many key thin-film processes have been replaced by ALD instead of traditional CVD or PVD methods,” says Peter Hsieh, Sales Director of Beneq’s Advanced ALD Business Unit. “In addition to semiconductors, many industries and fields have a trend towards miniaturization of components. By now, the development of ALD is closer to industrial-grade 12-inch mass production ALD equipment in fields such as optoelectronics and biomedical materials, camera modules, automotive, autonomous driving, lidar, VR, and medical materials. We are confident that there will be excellent application opportunities in the next few years.”

Beneq and Lung Pien will collaborate in the future to develop and actively promote ALD coating technology, which will be applied to high-end curved lenses in Taiwan’s optical market. ALD technology provides uniform conformal thin film layers for the most challenging structures, making it ideal for high-end optical applications. Lung Pien Vacuum Technology, as an industry pioneer, intends to continue contributing to the future development of the industry as a whole.